Inventor
CELII FRANCIS
US6 patents
Patents
6 patentsUS6211035B1Apr 3, 2001
Integrated circuit and method
TEXAS INSTRUMENTS INC370 citations98
US6444542B2Sep 3, 2002
Integrated circuit and method
TEXAS INSTRUMENTS INC51 citations96
US6902939B2Jun 7, 2005
Integrated circuit and method
TEXAS INSTRUMENTS INC18 citations92
US7300878B1Nov 27, 2007
Gas switching during an etch process to modulate the characteristics of the etch
TEXAS INSTRUMENTS INC7 citations73
US7361599B2Apr 22, 2008
Integrated circuit and method
TEXAS INSTRUMENTS INC6 citations62
US7572733B2Aug 11, 2009
Gas switching during an etch process to modulate the characteristics of the etch
TEXAS INSTRUMENTS INC1 citations51