Inventor
CHAN DAVID A
US15 patents
⚠️ This page may combine multiple inventors who share the name “CHAN DAVID A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6939198B1Sep 6, 2005
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC70 citations97
US7294039B2Nov 13, 2007
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC15 citations92
US7101251B2Sep 5, 2006
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC15 citations92
US6632124B2Oct 14, 2003
Optical monitoring in a two-step chemical mechanical polishing process
APPLIED MATERIALS INC17 citations92
US6506097B1Jan 14, 2003
Optical monitoring in a two-step chemical mechanical polishing process
APPLIED MATERIALS INC36 citations92
US7008875B2Mar 7, 2006
Methods and apparatus for polishing control
APPLIED MATERIALS INC14 citations81
US7927182B2Apr 19, 2011
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC6 citations73
US7585202B2Sep 8, 2009
Computer-implemented method for process control in chemical mechanical polishing
APPLIED MATERIALS INC4 citations73
US7400934B2Jul 15, 2008
Methods and apparatus for polishing control
APPLIED MATERIALS INC7 citations71