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Inventor
MATSUSHIMA YUTA
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “MATSUSHIMA YUTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patents
US10460976B2
Oct 29, 2019
Substrate transfer device and substrate transfer method
TOKYO ELECTRON LTD
5 citations
68
US11244849B2
Feb 8, 2022
Substrate transfer device and substrate transfer method
TOKYO ELECTRON LTD
0 citations
58
UNICHARM CORP
1 patent
US11337867B2
May 24, 2022
Disposable wearing article
UNICHARM CORP
0 citations
49