Inventor
KAZAMA KAZUNORI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KAZAMA KAZUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7756599B2Jul 13, 2010
Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program
TOKYO ELECTRON LTD10 citations83
US10460949B2Oct 29, 2019
Substrate processing apparatus, substrate processing method and storage medium
TOKYO ELECTRON LTD2 citations71
US10254774B2Apr 9, 2019
Temperature control method, control apparatus, and plasma processing apparatus
TOKYO ELECTRON LTD4 citations69
US12387955B2Aug 12, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations38