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Inventor
KELLNER WALTER-ULRICH
DE
2 patents
Patents
2 patents
US5701022A
Dec 23, 1997
Semiconductor memory device with trench capacitor
SIEMENS AG
20 citations
89
US5843819A
Dec 1, 1998
Semiconductor memory device with trench capacitor and method for the production thereof
SIEMENS AG
12 citations
70