Inventor
STOLL ROBERT W
US5 patents
Patents
5 patentsUS4741928AMay 3, 1988
Method for selective deposition of tungsten by chemical vapor deposition onto metal and semiconductor surfaces
GEN ELECTRIC26 citations91
US4653428AMar 31, 1987
Selective chemical vapor deposition apparatus
GEN ELECTRIC58 citations91
US4552783ANov 12, 1985
Enhancing the selectivity of tungsten deposition on conductor and semiconductor surfaces
GEN ELECTRIC39 citations91
US4554147ANov 19, 1985
Method for treating fumed silica
GEN ELECTRIC27 citations90
US4849377AJul 18, 1989
Active area planarization with self-aligned contacts
GEN ELECTRIC2 citations60