Inventor

HORWATH RONALD S

US5 patents

⚠️ This page may combine multiple inventors who share the name “HORWATH RONALD S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents

US4830706AMay 16, 1989

SEMATECH INC

2 patents

US6100184AAug 8, 2000

Method of making a dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layer

SEMATECH INC236 citations98

US6037664AMar 14, 2000

Dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layer

SEMATECH INC306 citations98

HORWATH RONALD S

IBM

Method of making sloped vias

Uniform plasma for drill smear removal reactor

Method for selectively etching the materials of a composite of two materials

SEMATECH INC

Method of making a dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layer

Dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layer