P

Inventor

CHOI SOO YOUNG

KR178 patents
⚠️ This page may combine multiple inventors who share the name “CHOI SOO YOUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

29 patents
US7785672B2Aug 31, 2010

Method of controlling the film properties of PECVD-deposited thin films

APPLIED MATERIALS INC247 citations99
US6825134B2Nov 30, 2004

Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow

APPLIED MATERIALS INC595 citations99
US6942753B2Sep 13, 2005

Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition

APPLIED MATERIALS INC810 citations98
US7514936B2Apr 7, 2009

Detection and suppression of electrical arcing

APPLIED MATERIALS INC59 citations96
US7292045B2Nov 6, 2007

Detection and suppression of electrical arcing

APPLIED MATERIALS INC45 citations94
US7902991B2Mar 8, 2011

Frequency monitoring to detect plasma process abnormality

APPLIED MATERIALS INC24 citations92
US7582515B2Sep 1, 2009

Multi-junction solar cells and methods and apparatuses for forming the same

APPLIED MATERIALS INC36 citations92
US7125758B2Oct 24, 2006

Controlling the properties and uniformity of a silicon nitride film by controlling the film forming precursors

APPLIED MATERIALS INC47 citations92
US7429410B2Sep 30, 2008

Diffuser gravity support

APPLIED MATERIALS INC32 citations91
US10262837B2Apr 16, 2019

Plasma uniformity control by gas diffuser hole design

APPLIED MATERIALS INC5 citations84
US9431631B2Aug 30, 2016

Plasma curing of PECVD HMDSO film for OLED applications

APPLIED MATERIALS INC5 citations84
US9397318B2Jul 19, 2016

Method for hybrid encapsulation of an organic light emitting diode

APPLIED MATERIALS INC8 citations84
US9269923B2Feb 23, 2016

Barrier films for thin film encapsulation

APPLIED MATERIALS INC12 citations84
US8343592B2Jan 1, 2013

Asymmetrical RF drive for electrode of plasma chamber

APPLIED MATERIALS INC13 citations84
US7972470B2Jul 5, 2011

Asymmetric grounding of rectangular susceptor

APPLIED MATERIALS INC10 citations84
US7884035B2Feb 8, 2011

Method of controlling film uniformity and composition of a PECVD-deposited A-SiNx : H gate dielectric film deposited over a large substrate surface

APPLIED MATERIALS INC8 citations84
US7754294B2Jul 13, 2010

Method of improving the uniformity of PECVD-deposited thin films

APPLIED MATERIALS INC14 citations84
US7199061B2Apr 3, 2007

Pecvd silicon oxide thin film deposition

APPLIED MATERIALS INC12 citations84
US10043641B2Aug 7, 2018

Methods and apparatus for processing chamber cleaning end point detection

APPLIED MATERIALS INC7 citations83
US7741144B2Jun 22, 2010

Plasma treatment between deposition processes

APPLIED MATERIALS INC14 citations83
US9677177B2Jun 13, 2017

Substrate support with quadrants

APPLIED MATERIALS INC6 citations82
US7993700B2Aug 9, 2011

Silicon nitride passivation for a solar cell

APPLIED MATERIALS INC8 citations81
US12362149B2Jul 15, 2025

Film stress control for plasma enhanced chemical vapor deposition

APPLIED MATERIALS INC1 citations74
US10312058B2Jun 4, 2019

Plasma uniformity control by gas diffuser hole design

APPLIED MATERIALS INC3 citations73
US10087524B2Oct 2, 2018

Showerhead support structure for improved gas flow

APPLIED MATERIALS INC5 citations73
US9818606B2Nov 14, 2017

Amorphous silicon thickness uniformity improved by process diluted with hydrogen and argon gas mixture

APPLIED MATERIALS INC4 citations73
US9502686B2Nov 22, 2016

Fluorine-containing polymerized HMDSO applications for OLED thin film encapsulation

APPLIED MATERIALS INC3 citations73
US9299558B2Mar 29, 2016

Run-to-run stability of film deposition

APPLIED MATERIALS INC3 citations73
US8381677B2Feb 26, 2013

Prevention of film deposition on PECVD process chamber wall

APPLIED MATERIALS INC6 citations73

CHOI SOO YOUNG

10 patents

TINER ROBIN L

1 patent

PARK BEOM SOO

1 patent

APPLIED KOMATSU TECHNOLOGY INC

1 patent

KELLER ERNST

1 patent

BACHRACH ROBERT Z

1 patent

CHOI YOUNG JIN

1 patent

WON TAE KYUNG

1 patent

SON OCK SOO

1 patent

ANWAR SUHAIL

1 patent

SHENG SHURAN

1 patent

POLYMER VENTURES INC

1 patent

Showing the top 50 of 178 patents by PatentIndex Score.