Inventor
KALOYEROS ALAIN E
US21 patents
⚠️ This page may combine multiple inventors who share the name “KALOYEROS ALAIN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GELEST INC
12 patentsUS6586056B2Jul 1, 2003
Silicon based films formed from iodosilane precursors and method of making the same
GELEST INC59 citations96
US6090709AJul 18, 2000
Methods for chemical vapor deposition and preparation of conformal titanium-based films
GELEST INC54 citations96
US6066196AMay 23, 2000
Method for the chemical vapor deposition of copper-based films and copper source precursors for the same
GELEST INC82 citations96
US6037001AMar 14, 2000
Method for the chemical vapor deposition of copper-based films
GELEST INC60 citations96
US5919531AJul 6, 1999
Tantalum and tantalum-based films and methods of making the same
GELEST INC67 citations96
US6139922AOct 31, 2000
Tantalum and tantalum-based films formed using fluorine-containing source precursors and methods of making the same
GELEST INC37 citations92
US12378666B2Aug 5, 2025
Silicon carbide thin films and vapor deposition methods thereof
GELEST INC0 citations62
US12344934B2Jul 1, 2025
Silicon-based thin films from N-alkyl substituted perhydridocyclotrisilazanes
GELEST INC0 citations62
US12065737B2Aug 20, 2024
Silicon-based thin films from N-alkyl substituted perhydridocyclotrisilazanes
GELEST INC0 citations62
US11987882B2May 21, 2024
Silicon carbide thin films and vapor deposition methods thereof
GELEST INC0 citations62
US11634811B2Apr 25, 2023
Process for thin film deposition through controlled formation of vapor phase transient species
GELEST INC0 citations62
US11248291B2Feb 15, 2022
Process for thin film deposition through controlled formation of vapor phase transient species
GELEST INC0 citations62
UNIV NEW YORK STATE RES FOUND
6 patentsUS6884466B2Apr 26, 2005
Process for low-temperature metal-organic chemical vapor deposition of tungsten nitride and tungsten nitride films
UNIV NEW YORK STATE RES FOUND101 citations98
US5968611AOct 19, 1999
Silicon nitrogen-based films and method of making the same
UNIV NEW YORK STATE RES FOUND68 citations96
US6534133B1Mar 18, 2003
Methodology for in-situ doping of aluminum coatings
UNIV NEW YORK STATE RES FOUND537 citations94
US6077571AJun 20, 2000
Conformal pure and doped aluminum coatings and a methodology and apparatus for their preparation
UNIV NEW YORK STATE RES FOUND67 citations93
US5376409ADec 27, 1994
Process and apparatus for the use of solid precursor sources in liquid form for vapor deposition of materials
UNIV NEW YORK STATE RES FOUND91 citations93
US6099903AAug 8, 2000
MOCVD processes using precursors based on organometalloid ligands
UNIV NEW YORK STATE RES FOUND45 citations90