Inventor
USHIO YOSHIJIRO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “USHIO YOSHIJIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
13 patentsUS6670200B2Dec 30, 2003
Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same
NIKON CORP129 citations98
US6271047B1Aug 7, 2001
Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same
NIKON CORP239 citations98
US6489624B1Dec 3, 2002
Apparatus and methods for detecting thickness of a patterned layer
NIKON CORP115 citations97
US7052920B2May 30, 2006
Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same
NIKON CORP62 citations96
US5148306ASep 15, 1992
Electrochromic device with specific resistances
NIKON CORP96 citations96
US6102775AAug 15, 2000
Film inspection method
NIKON CORP59 citations95
US6458014B1Oct 1, 2002
Polishing body, polishing apparatus, polishing apparatus adjustment method, polished film thickness or polishing endpoint measurement method, and semiconductor device manufacturing method
NIKON CORP125 citations94
US6108096AAug 22, 2000
Light absorption measurement apparatus and methods
NIKON CORP43 citations92
US5673114ASep 30, 1997
Apparatus for measuring optical absorption of sample and sample holder applicable to the same
NIKON CORP20 citations92
US6679756B2Jan 20, 2004
Method and apparatus for monitoring polishing state, polishing device, process wafer, semiconductor device, and method of manufacturing semiconductor device
NIKON CORP17 citations84
US7108580B2Sep 19, 2006
Method and device for simulation, method and device for polishing, method and device for preparing control parameters or control program, polishing system, recording medium, and method of manufacturing semiconductor device
NIKON CORP10 citations73
US5641597AJun 24, 1997
Circuit forming method and apparatus therefor
NIKON CORP8 citations73
US7203564B2Apr 10, 2007
Treatment condition decision method, treatment condition decision system, treatment system, treatment condition decision calculator program, program recording medium, and semiconductor device manufacturing method
NIKON CORP0 citations51