P

Inventor

UEDA TAKEHIKO

JP26 patents
⚠️ This page may combine multiple inventors who share the name “UEDA TAKEHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

11 patents
US6670200B2Dec 30, 2003

Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same

NIKON CORP129 citations98
US6271047B1Aug 7, 2001

Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same

NIKON CORP239 citations98
US6489624B1Dec 3, 2002

Apparatus and methods for detecting thickness of a patterned layer

NIKON CORP115 citations97
US7052920B2May 30, 2006

Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same

NIKON CORP62 citations96
US6963407B2Nov 8, 2005

Process end point detection apparatus and method, polishing apparatus, semiconductor device manufacturing method, and recording medium recorded with signal processing program

NIKON CORP19 citations92
US7169016B2Jan 30, 2007

Chemical mechanical polishing end point detection apparatus and method

NIKON CORP11 citations81
US7686673B2Mar 30, 2010

Working shape prediction method, working requirement determination method, working method, working system, method of manufacturing semiconductor device, computer program, and computer program storage medium

NIKON CORP5 citations73
US6556179B2Apr 29, 2003

Display device and camera having the display device

NIKON CORP10 citations73
US7981309B2Jul 19, 2011

Method for detecting polishing end in CMP polishing device, CMP polishing device, and semiconductor device manufacturing method

NIKON CORP2 citations60
US6051444AApr 18, 2000

Method of manufacture of liquid crystal display device having characteristics which differ locally

NIKON CORP1 citations52
US10429402B2Oct 1, 2019

Washing/drying apparatus, screening apparatus, washing/drying method, and screening method

NIKON CORP0 citations45

TERUMO CORP

6 patents

FUJI PHOTO FILM CO LTD

3 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

MATSUSHITA ELECTRONS CORP

1 patent

KASUGA DENKI INC

1 patent

FUTABA DENSHI KOGYO KK

1 patent

SATURN LICENSING LLC

1 patent

SENGA TATSUYA

1 patent