Inventor
SUZUKI TSUKURU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI TSUKURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
8 patentsUS6932884B2Aug 23, 2005
Substrate processing apparatus
EBARA CORP26 citations92
US7208076B2Apr 24, 2007
Substrate processing apparatus and method
EBARA CORP10 citations83
US7101465B2Sep 5, 2006
Electrolytic processing device and substrate processing apparatus
EBARA CORP14 citations83
US7476290B2Jan 13, 2009
Substrate processing apparatus and substrate processing method
EBARA CORP9 citations82
US7638030B2Dec 29, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP3 citations62
US7527723B2May 5, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP2 citations62
US7427345B2Sep 23, 2008
Method and device for regenerating ion exchanger, and electrolytic processing apparatus
EBARA CORP3 citations62
US7563356B2Jul 21, 2009
Composite processing apparatus and method
EBARA CORP0 citations41
EBARA RES CO LTD
5 patentsUS5922105AJul 13, 1999
Method and apparatus for the preparation of clean gases
EBARA RES CO LTD46 citations92
US6733570B2May 11, 2004
Method and apparatus for the preparation of clean gases
EBARA RES CO LTD4 citations73
US6340381B1Jan 22, 2002
Method and apparatus for the preparation of clean gases
EBARA RES CO LTD11 citations73
US7029518B2Apr 18, 2006
Method and apparatus for the preparation of clean gases
EBARA RES CO LTD1 citations62
US6911064B2Jun 28, 2005
Method and apparatus for the preparation of clean gases
EBARA RES CO LTD4 citations62