Inventor

RUGHEIMER PAUL POWELL

US2 patents

Patents

2 patents

US7109121B2Sep 19, 2006

Stress control of semiconductor microstructures for thin film growth

WISCONSIN ALUMNI RES FOUND6 citations71

US6858888B2Feb 22, 2005

Stress control of semiconductor microstructures for thin film growth

WISCONSIN ALUMNI RES FOUND7 citations71