Inventor
YU YONG SIK
KR13 patents
Patents
13 patentsUS6627462B1Sep 30, 2003
Semiconductor device having a capacitor and method for the manufacture thereof
HYUNDAI ELECTRONICS IND40 citations92
US6338759B1Jan 15, 2002
Metal organic chemical vapor deposition apparatus and deposition method
HYUNDAI ELECTRONICS IND22 citations92
US6465260B1Oct 15, 2002
Semiconductor device having a ferroelectric capacitor and method for the manufacture thereof
HYUNDAI ELECTRONICS IND17 citations83
US5861332AJan 19, 1999
Method for fabricating capacitors of semiconductor devices
HYUNDAI ELECTRONICS IND17 citations83
US6723598B2Apr 20, 2004
Method for manufacturing aluminum oxide films for use in semiconductor devices
HYUNDAI ELECTRONICS IND8 citations73
US6395601B2May 28, 2002
Method for forming a lower electrode for use in a semiconductor device
HYUNDAI ELECTRONICS IND8 citations73
US6284588B1Sep 4, 2001
Method for fabricating ferroelectric memory devices capable of preventing volatility of elements in ferroelectric films
HYUNDAI ELECTRONICS IND14 citations73
US6235542B1May 22, 2001
Ferroelectric memory device and method for fabricating the same
HYUNDAI ELECTRONICS IND7 citations73
US6146963ANov 14, 2000
Methods for forming ferroelectric capacitors having a bottom electrode with decreased leakage current
HYUNDAI ELECTRONICS IND14 citations73
US6008143ADec 28, 1999
Metal organic chemical vapor deposition apparatus and deposition method
HYUNDAI ELECTRONICS IND12 citations73
US6468874B1Oct 22, 2002
Method of manufacturing a capacitor in a semiconductor device
HYUNDAI ELECTRONICS IND8 citations65
US6465300B2Oct 15, 2002
Method for forming a lower electrode for use in a semiconductor device
HYUNDAI ELECTRONICS IND4 citations62
US6162698ADec 19, 2000
Method of manufacturing a capacitor in a semiconductor device
HYUNDAI ELECTRONICS IND2 citations62