Inventor
HARRISON ARTHUR W
US5 patents
Patents
5 patentsUS5888048AMar 30, 1999
Automatic wafer boat loading
AMTECH SYSTEMS INC17 citations91
US5765982AJun 16, 1998
Automatic wafer boat loading system and method
AMTECH SYSTEMS INC29 citations91
US6537010B2Mar 25, 2003
Wafer boat support and method for twin tower wafer boat loader
AMTECH SYSTEMS INC14 citations80
US6352399B1Mar 5, 2002
Twin tower wafer boat loading system and method
AMTECH SYSTEMS INC11 citations72
US6565304B2May 20, 2003
Wafer boat elevator system and method
AMTECH SYSTEMS INC5 citations58