Inventor
TOYOSHIMA TOSHIYUKI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “TOYOSHIMA TOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
10 patentsUS6579657B1Jun 17, 2003
Material for forming a fine pattern and method for manufacturing a semiconductor device using the same
MITSUBISHI ELECTRIC CORP169 citations98
US5858620AJan 12, 1999
Semiconductor device and method for manufacturing the same
MITSUBISHI ELECTRIC CORP267 citations98
US6319853B1Nov 20, 2001
Method of manufacturing a semiconductor device using a minute resist pattern, and a semiconductor device manufactured thereby
MITSUBISHI ELECTRIC CORP136 citations97
US6180320B1Jan 30, 2001
Method of manufacturing a semiconductor device having a fine pattern, and semiconductor device manufactured thereby
MITSUBISHI ELECTRIC CORP70 citations95
US6924240B2Aug 2, 2005
Low dielectric constant material, insulating film comprising the low dielectric constant material, and semiconductor device
MITSUBISHI ELECTRIC CORP24 citations92
US6568996B2May 27, 2003
Polishing agent for processing semiconductor, dispersant used therefor and process for preparing semiconductor device using above polishing agent for processing semiconductor
MITSUBISHI ELECTRIC CORP38 citations92
US6774314B2Aug 10, 2004
Electronic device and coupler
MITSUBISHI ELECTRIC CORP16 citations83
US6699748B2Mar 2, 2004
Method of fabricating capacitor having a photosensitive resin layer as a dielectric
MITSUBISHI ELECTRIC CORP4 citations62
US7030007B2Apr 18, 2006
Via-filling material and process for fabricating semiconductor integrated circuit using the material
MITSUBISHI ELECTRIC CORP3 citations61
US7100275B2Sep 5, 2006
Method of producing a multi-layered wiring board
MITSUBISHI ELECTRIC CORP2 citations60