Inventor
ARAKI SHINICHIRO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “ARAKI SHINICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS5564889AOct 15, 1996
Semiconductor treatment system and method for exchanging and treating substrate
TOKYO ELECTRON LTD136 citations96
US6203617B1Mar 20, 2001
Conveying unit and substrate processing unit
TOKYO ELECTRON LTD63 citations92
US6270576B1Aug 7, 2001
Coating and developing apparatus
TOKYO ELECTRON LTD24 citations89
US6444409B2Sep 3, 2002
Coating and developing method
TOKYO ELECTRON LTD9 citations71
US9256221B2Feb 9, 2016
Information processing apparatus, processing system, processing method, and program
TOKYO ELECTRON LTD4 citations69
US7815366B2Oct 19, 2010
Method of detecting extraneous matter on heat processing plate, heat processing apparatus, program, and computer-readable recording medium with program recorded thereon
TOKYO ELECTRON LTD6 citations62
US7609361B2Oct 27, 2009
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD4 citations61