Inventor
SHIH JUI-AN
TW4 patents
Patents
4 patentsUS6778879B2Aug 17, 2004
Automated material handling system and method of use
TAIWAN SEMICONDUCTOR MFG21 citations89
US6931303B2Aug 16, 2005
Integrated transport system
TAIWAN SEMICONDUCTOR MFG15 citations79
US7269469B2Sep 11, 2007
System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool
TAIWAN SEMICONDUCTOR MFG4 citations58
US7203563B2Apr 10, 2007
Automatic N2 purge system for 300 mm full automation fab
TAIWAN SEMICONDUCTOR MFG3 citations58