Inventor

YOKONO NORIAKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “YOKONO NORIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAINIPPON SCREEN MFG

3 patents

US5436848AJul 25, 1995

Method of and device for transporting semiconductor substrate in semiconductor processing system

DAINIPPON SCREEN MFG102 citations94

US6053058AApr 25, 2000

Atmosphere concentration monitoring for substrate processing apparatus and life determination for atmosphere processing unit of substrate processing apparatus

DAINIPPON SCREEN MFG19 citations82

US6963789B2Nov 8, 2005

Substrate processing apparatus control system and substrate processing apparatus

DAINIPPON SCREEN MFG8 citations68

KASHIYAMA MASAHITO

1 patent

US8477301B2Jul 2, 2013

Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus

KASHIYAMA MASAHITO4 citations60