Inventor
LODDEN GRANT H
US4 patents
Patents
4 patentsUS10024656B2Jul 17, 2018
System and methods for highly integrated optical readout MEMS sensors
HONEYWELL INT INC2 citations69
US8735199B2May 27, 2014
Methods for fabricating MEMS structures by etching sacrificial features embedded in glass
HONEYWELL INT INC2 citations58
US10131535B2Nov 20, 2018
Monolithic fabrication of thermally isolated microelectromechanical system (MEMS) devices
HONEYWELL INT INC0 citations38
US10033354B2Jul 24, 2018
Systems and methods for device temperature stabilization
HONEYWELL INT INC0 citations38