Inventor
CHOU CHUNG-PIN
TW15 patents
Patents
15 patentsUS10825650B2Nov 3, 2020
Machine learning on wafer defect review
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US11816411B2Nov 14, 2023
Method and system for semiconductor wafer defect review
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US11764094B2Sep 19, 2023
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11300525B2Apr 12, 2022
Wafer inspection apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11935722B2Mar 19, 2024
Machine learning on wafer defect review
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11424101B2Aug 23, 2022
Machine learning on wafer defect review
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12087611B2Sep 10, 2024
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12038389B2Jul 16, 2024
Wafer inspection apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12190036B2Jan 7, 2025
Method and system for semiconductor wafer defect review
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11017522B2May 25, 2021
Inspection and cleaning system and method for the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US12119273B2Oct 15, 2024
System and method for high speed inspection of semiconductor substrates
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US11749571B2Sep 5, 2023
System and method for high speed inspection of semiconductor substrates
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US10871454B2Dec 22, 2020
Inspection method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US12326397B2Jun 10, 2025
In-situ apparatus for detecting abnormality in process tube
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US12272576B2Apr 8, 2025
Apparatus and methods for determining fluid dynamics of liquid film on wafer surface
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47