Inventor

TOKUHIRA Shinnosuke

JP3 patents

Patents

3 patents

US10837447B2Nov 17, 2020

Vacuum pump having a first housing with a supply port and a second housing with a recess portion

ULVAC INC2 citations66

US10612673B2Apr 7, 2020

Gate valve

ULVAC INC2 citations65

US11092246B2Aug 17, 2021

Gate valve

ULVAC INC0 citations43