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Inventor
TRUMPETTO JOHN A
US
3 patents
Patents
3 patents
US5268068A
Dec 7, 1993
High aspect ratio molybdenum composite mask method
IBM
51 citations
86
US6238741B1
May 29, 2001
Single mask screening process
IBM
16 citations
79
US6662718B2
Dec 16, 2003
Screening mask having a stress-relieving area
IBM
2 citations
53