Inventor

HO CHUNG-PENG

US3 patents

⚠️ This page may combine multiple inventors who share the name “HO CHUNG-PENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7070915B2Jul 4, 2006

Method and system for drying a substrate

TOKYO ELECTRON LTD81 citations91

US7582414B2Sep 1, 2009

Method and system for drying a substrate

TOKYO ELECTRON LTD0 citations46

MOTOROLA INC

1 patent

US6586160B2Jul 1, 2003

Method for patterning resist

MOTOROLA INC43 citations90