Inventor

LEE SEOK-KYUN

KR2 patents

⚠️ This page may combine multiple inventors who share the name “LEE SEOK-KYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

1 patent

US7868488B2Jan 11, 2011

Magnetic levitation wafer stage, and method of using the stage in an exposure apparatus

SAMSUNG ELECTRONICS CO LTD20 citations83

SAMSUNG ELECTRIC

1 patent

US7633186B2Dec 15, 2009

Magnetic levitation wafer stage, and method of using the stage in an exposure apparatus

SAMSUNG ELECTRIC0 citations42