Inventor
DEMOOR STEPHEN J
US5 patents
⚠️ This page may combine multiple inventors who share the name “DEMOOR STEPHEN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
3 patentsUS5696835ADec 9, 1997
Apparatus and method for aligning and measuring misregistration
TEXAS INSTRUMENTS INC107 citations95
US7642021B2Jan 5, 2010
Method of mapping lithography focus errors
TEXAS INSTRUMENTS INC2 citations60
US6847919B2Jan 25, 2005
Characterizing an exposure tool for patterning a wafer
TEXAS INSTRUMENTS INC2 citations57