Inventor
BULA OREST
US22 patents
Patents
22 patentsUS6016357AJan 18, 2000
Feedback method to repair phase shift masks
IBM201 citations99
US6425112B1Jul 23, 2002
Auto correction of error checked simulated printed images
IBM235 citations98
US6373975B1Apr 16, 2002
Error checking of simulated printed images with process window effects included
IBM87 citations97
US7257247B2Aug 14, 2007
Mask defect analysis system
IBM13 citations92
US6704695B1Mar 9, 2004
Interactive optical proximity correction design method
IBM24 citations92
US6627361B2Sep 30, 2003
Assist features for contact hole mask patterns
IBM29 citations92
US6539321B2Mar 25, 2003
Method for edge bias correction of topography-induced linewidth variation
IBM22 citations92
US6395438B1May 28, 2002
Method of etch bias proximity correction
IBM33 citations92
US6383719B1May 7, 2002
Process for enhanced lithographic imaging
IBM32 citations92
US6261724B1Jul 17, 2001
Method of modifying a microchip layout data set to generate a predicted mask printed data set
IBM20 citations92
US6268908B1Jul 31, 2001
Micro adjustable illumination aperture
IBM22 citations91
US6238850B1May 29, 2001
Method of forming sharp corners in a photoresist layer
IBM79 citations91
US6214494B1Apr 10, 2001
Serif mask design methodology based on enhancing high spatial frequency contribution for improved printability
IBM34 citations89
US5317573AMay 31, 1994
Apparatus and method for real time data error capture and compression redundancy analysis
IBM44 citations88
US6577406B2Jun 10, 2003
Structure for lithographic focus control features
IBM16 citations83
US7492940B2Feb 17, 2009
Mask defect analysis system
IBM2 citations62
US7492941B2Feb 17, 2009
Mask defect analysis system
IBM3 citations62
US6667136B2Dec 23, 2003
Method to control nested to isolated line printing
IBM5 citations62
US6458493B2Oct 1, 2002
Method to control nested to isolated line printing
IBM4 citations62
US6429469B1Aug 6, 2002
Optical Proximity Correction Structures Having Decoupling Capacitors
IBM5 citations62
US6258490B1Jul 10, 2001
Transmission control mask utilized to reduce foreshortening effects
IBM6 citations62
US5093584AMar 3, 1992
Self calibrating timing circuit
IBM4 citations58