Inventor
PAN YU-HAO
TW5 patents
Patents
5 patentsUS9969049B2May 15, 2018
Polishing layer of polishing pad and method of forming the same and polishing method
IV TECH CO LTD2 citations67
US10421173B2Sep 24, 2019
Base layer, polishing pad with base layer, and polishing method
IV TECH CO LTD3 citations63
US11858089B2Jan 2, 2024
Polishing layer and polishing method
IV TECH CO LTD0 citations54
US10478940B2Nov 19, 2019
Manufacturing method of polishing layer, and polishing method
IV TECH CO LTD0 citations44
US10828745B2Nov 10, 2020
Polishing pad and polishing method
IV TECH CO LTD0 citations42