Inventor
KHIVSARA SAGAR DEEPAK
TW7 patents
Patents
7 patentsUS11768437B2Sep 26, 2023
System and method for performing extreme ultraviolet photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11392040B2Jul 19, 2022
System and method for performing extreme ultraviolet photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US12174545B2Dec 24, 2024
System and method for performing extreme ultraviolet photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12096544B2Sep 17, 2024
Lithography thermal control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11647578B2May 9, 2023
Lithography thermal control
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12372886B2Jul 29, 2025
Acoustic particle deflection in lithography tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11822259B2Nov 21, 2023
Acoustic particle deflection in lithography tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61