Inventor
BARBOSA LIMA LUCAS PETERSEN
BE9 patents
Patents
9 patentsUS11495459B2Nov 8, 2022
Methods for selective deposition using a sacrificial capping layer
ASM IP HOLDING BV2 citations71
US12266695B2Apr 1, 2025
Structures with doped semiconductor layers and methods and systems for forming same
ASM IP HOLDING BV1 citations62
US11781243B2Oct 10, 2023
Method for depositing low temperature phosphorous-doped silicon
ASM IP HOLDING BV1 citations61
US11646205B2May 9, 2023
Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same
ASM IP HOLDING BV0 citations61
US11594600B2Feb 28, 2023
Structures with doped semiconductor layers and methods and systems for forming same
ASM IP HOLDING BV1 citations61
US11688603B2Jun 27, 2023
Methods of forming silicon germanium structures
ASM IP HOLDING BV1 citations59
US12406846B2Sep 2, 2025
Method for depositing boron and gallium containing silicon germanium layers
ASM IP HOLDING BV0 citations51
US12266524B2Apr 1, 2025
Method for depositing boron containing silicon germanium layers
ASM IP HOLDING BV0 citations50
US11637014B2Apr 25, 2023
Methods for selective deposition of doped semiconductor material
ASM IP HOLDING BV0 citations50