Inventor
NISHIMOTO YUHKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “NISHIMOTO YUHKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON SALES CO INC
6 patentsUS5620523AApr 15, 1997
Apparatus for forming film
CANON SALES CO INC215 citations98
US6225236B1May 1, 2001
Method for reforming undercoating surface and method for production of semiconductor device
CANON SALES CO INC43 citations91
US6815824B2Nov 9, 2004
Semiconductor device and method of manufacturing the same
CANON SALES CO INC10 citations73
US6780790B2Aug 24, 2004
Semiconductor device and method of manufacturing the same
CANON SALES CO INC6 citations62
US6713383B2Mar 30, 2004
Semiconductor device manufacturing method
CANON SALES CO INC5 citations62
US6649495B2Nov 18, 2003
Manufacturing method of semiconductor device
CANON SALES CO INC3 citations62
SEMICONDUCTOR PROCESS LAB CO
3 patentsUS5858100AJan 12, 1999
Substrate holder and reaction apparatus
SEMICONDUCTOR PROCESS LAB CO82 citations96
US6352943B2Mar 5, 2002
Method of film formation and method for manufacturing semiconductor device
SEMICONDUCTOR PROCESS LAB CO21 citations92
US7329612B2Feb 12, 2008
Semiconductor device and process for producing the same
SEMICONDUCTOR PROCESS LAB CO0 citations52