Inventor

OHGAWARA SHOJI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “OHGAWARA SHOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON SALES CO INC

5 patents

US6479409B2Nov 12, 2002

Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent

CANON SALES CO INC74 citations95

US6645883B2Nov 11, 2003

Film forming method, semiconductor device and manufacturing method of the same

CANON SALES CO INC24 citations92

US6642157B2Nov 4, 2003

Film forming method and semiconductor device

CANON SALES CO INC33 citations92

US6124210ASep 26, 2000

Method of cleaning surface of substrate and method of manufacturing semiconductor device

CANON SALES CO INC25 citations89

US6713383B2Mar 30, 2004

Semiconductor device manufacturing method

CANON SALES CO INC5 citations62

SEMICONDUCTOR PROCESS LAB CO

1 patent

US6911405B2Jun 28, 2005

Semiconductor device and method of manufacturing the same

SEMICONDUCTOR PROCESS LAB CO4 citations62