Inventor
LEE TIEN-HSI
US7 patents
⚠️ This page may combine multiple inventors who share the name “LEE TIEN-HSI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS9256123B2Feb 9, 2016
Method of making an extreme ultraviolet pellicle
TAIWAN SEMICONDUCTOR MFG CO LTD365 citations99
US9664999B2May 30, 2017
Method of making an extreme ultraviolet pellicle
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9442368B2Sep 13, 2016
Method of making an extreme ultraviolet pellicle
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52