Inventor

KUANG WILLIAM

US6 patents

⚠️ This page may combine multiple inventors who share the name “KUANG WILLIAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US10704142B2Jul 7, 2020

Quick disconnect resistance temperature detector assembly for rotating pedestal

APPLIED MATERIALS INC2 citations70

US7910853B2Mar 22, 2011

Direct real-time monitoring and feedback control of RF plasma output for wafer processing

APPLIED MATERIALS INC0 citations51

US11495932B2Nov 8, 2022

Slip ring for use in rotatable substrate support

APPLIED MATERIALS INC0 citations49

CHANG YU

2 patents

US8114256B2Feb 14, 2012

Control of arbitrary scan path of a rotating magnetron

CHANG YU6 citations77

US8721847B2May 13, 2014

Homing of arbitrary scan path of a rotating magnetron

CHANG YU4 citations66

CUVALCI OLKAN

1 patent

US9202674B2Dec 1, 2015

Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements

CUVALCI OLKAN0 citations37