Inventor

KAWAJIRI RYO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KAWAJIRI RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIMODA TATSUYA

1 patent

US9653306B2May 16, 2017

Method for forming crystalline cobalt silicide film

SHIMODA TATSUYA3 citations69

KOYAMA YOSHIHIRO

1 patent

US9257273B2Feb 9, 2016

Charged particle beam apparatus, thin film forming method, defect correction method and device forming method

KOYAMA YOSHIHIRO1 citations43