Inventor
BLANK RICHARD
US13 patents
⚠️ This page may combine multiple inventors who share the name “BLANK RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
11 patentsUS9190306B2Nov 17, 2015
Dual arm vacuum robot
LAM RES CORP25 citations92
US10651065B2May 12, 2020
Auto-calibration to a station of a process module that spins a wafer
LAM RES CORP6 citations82
US11521869B2Dec 6, 2022
Reduced footprint platform architecture with linear vacuum transfer module
LAM RES CORP3 citations72
US11024531B2Jun 1, 2021
Optimized low energy / high productivity deposition system
LAM RES CORP4 citations70
US11908714B2Feb 20, 2024
Transfer robot for reduced footprint platform architecture
LAM RES CORP0 citations62
US12489006B2Dec 2, 2025
Auto-calibration to a station of a process module that spins a wafer
LAM RES CORP0 citations60
US11742229B2Aug 29, 2023
Auto-calibration to a station of a process module that spins a wafer
LAM RES CORP0 citations60
US11239100B2Feb 1, 2022
Auto-calibration to a station of a process module that spins a wafer
LAM RES CORP0 citations60
US12322641B2Jun 3, 2025
Mechanical indexer for multi-station process module
LAM RES CORP0 citations58
US12168301B2Dec 17, 2024
Fixture for automatic calibration of substrate transfer robot
LAM RES CORP0 citations55
US9576833B2Feb 21, 2017
Robot for a substrate processing system
LAM RES CORP1 citations51