Inventor

MOON BURL M

US3 patents

Patents

3 patents

US4861533AAug 29, 1989

Method of preparing silicon carbide capillaries

AIR PROD & CHEM25 citations89

US4772498ASep 20, 1988

Silicon carbide capillaries

AIR PROD & CHEM39 citations89

US4823736AApr 25, 1989

Barrel structure for semiconductor epitaxial reactor

AIR PROD & CHEM50 citations86