Inventor
TAKAYAMA TAKAMITSU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TAKAYAMA TAKAMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS12090529B2Sep 17, 2024
Method of cleaning stage in plasma processing apparatus, and the plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US11865591B2Jan 9, 2024
Method of cleaning stage in plasma processing apparatus, and the plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US9330891B2May 3, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US10192719B2Jan 29, 2019
Plasma processing method
TOKYO ELECTRON LTD0 citations37
NIPPON KOKAN KK
3 patentsUS5730527AMar 24, 1998
Method and apparatus for measuring temperature using an optical fiber
NIPPON KOKAN KK32 citations91
US5438415AAug 1, 1995
Ellipsometer and method of controlling coating thickness therewith
NIPPON KOKAN KK44 citations90
US6004031ADec 21, 1999
Temperature measuring device
NIPPON KOKAN KK35 citations89