Inventor

TAKAKUWA MASAKI

JP11 patents

⚠️ This page may combine multiple inventors who share the name “TAKAKUWA MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

3 patents

US6969862B2Nov 29, 2005

Charged-particle-beam exposure apparatus and method of controlling same

CANON KK19 citations92

US7034321B2Apr 25, 2006

Electron beam exposure apparatus and electron beam measurement module

CANON KK9 citations73

US6870310B2Mar 22, 2005

Multibeam generating apparatus and electron beam drawing apparatus

CANON KK5 citations62

DENSO CORP

3 patents

US6807864B2Oct 26, 2004

Pressure sensor with water repellent filter

DENSO CORP22 citations92

US6575038B1Jun 10, 2003

Pressure sensor and method for assembling the same

DENSO CORP20 citations92

US6085598AJul 11, 2000

Pressure sensor device having breakable mounting member

DENSO CORP26 citations89

NIPPON DENSO CO

2 patents

US5900554AMay 4, 1999

Pressure sensor

NIPPON DENSO CO56 citations96

US5747694AMay 5, 1998

Pressure sensor with barrier in a pressure chamber

NIPPON DENSO CO58 citations95

HITACHI LTD

2 patents

US6768118B2Jul 27, 2004

Electron beam monitoring sensor and electron beam monitoring method

HITACHI LTD8 citations74

US6946662B2Sep 20, 2005

Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method

HITACHI LTD11 citations71

ADVANTEST CORP

1 patent

US7015482B2Mar 21, 2006

Electron beam writing equipment using plural beams and method

ADVANTEST CORP1 citations52