Inventor
KAWATE SHIN-ICHI
JP6 patents
Patents
6 patentsUS6025115AFeb 15, 2000
Processing method for etching a substrate
CANON KK25 citations92
US5863706AJan 26, 1999
Processing method for patterning a film
CANON KK22 citations92
US5714306AFeb 3, 1998
Processing method and apparatus
CANON KK18 citations92
US5981001ANov 9, 1999
Processing method for selectively irradiating a surface in presence of a reactive gas to cause etching
CANON KK14 citations81
US5962194AOct 5, 1999
Processing method and apparatus
CANON KK14 citations81
US5824455AOct 20, 1998
Processing method and apparatus
CANON KK16 citations81