Inventor
OKITA YOICHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “OKITA YOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
7 patentsUS6720600B2Apr 13, 2004
FeRam semiconductor device with improved contact plug structure
FUJITSU LTD69 citations95
US6825076B2Nov 30, 2004
Method of manufacturing the FeRAM semiconductor device with improved contact plug structure
FUJITSU LTD16 citations91
US6713798B2Mar 30, 2004
Semiconductor device having a capacitor and method of manufacturing the same
FUJITSU LTD5 citations72
US6926800B2Aug 9, 2005
Plasma etching method and apparatus
FUJITSU LTD8 citations69
US7198960B2Apr 3, 2007
Method for fabricating ferroelectric capacitor
FUJITSU LTD5 citations61
US6987045B2Jan 17, 2006
Semiconductor device and method of manufacturing the same
FUJITSU LTD3 citations61
US7102186B2Sep 5, 2006
Semiconductor device and method of manufacturing the same
FUJITSU LTD0 citations51
FUJITSU MICROELECTRONICS LTD
4 patentsUS7547558B2Jun 16, 2009
Method for manufacturing semiconductor device
FUJITSU MICROELECTRONICS LTD11 citations84
US7700978B2Apr 20, 2010
Semiconductor device and method of manufacturing the same
FUJITSU MICROELECTRONICS LTD3 citations61
US7595250B2Sep 29, 2009
Semiconductor device and method of manufacturing the same
FUJITSU MICROELECTRONICS LTD0 citations51
US7550799B2Jun 23, 2009
Semiconductor device and fabrication method of a semiconductor device
FUJITSU MICROELECTRONICS LTD0 citations51
FUJITSU SEMICONDUCTOR LTD
3 patentsUS8044447B2Oct 25, 2011
Semiconductor device and method for manufacturing the same
FUJITSU SEMICONDUCTOR LTD2 citations61
US8034676B2Oct 11, 2011
Semiconductor device and method of manufacturing the same
FUJITSU SEMICONDUCTOR LTD2 citations61
US7906033B2Mar 15, 2011
Plasma etching method and apparatus
FUJITSU SEMICONDUCTOR LTD0 citations47