Inventor
WANG JUDY
US7 patents
⚠️ This page may combine multiple inventors who share the name “WANG JUDY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6403491B1Jun 11, 2002
Etch method using a dielectric etch chamber with expanded process window
APPLIED MATERIALS INC396 citations97
US7807064B2Oct 5, 2010
Halogen-free amorphous carbon mask etch having high selectivity to photoresist
APPLIED MATERIALS INC8 citations83
US7432210B2Oct 7, 2008
Process to open carbon based hardmask
APPLIED MATERIALS INC9 citations82
US7510976B2Mar 31, 2009
Dielectric plasma etch process with in-situ amorphous carbon mask with improved critical dimension and etch selectivity
APPLIED MATERIALS INC6 citations61
US7838432B2Nov 23, 2010
Etch process with controlled critical dimension shrink
APPLIED MATERIALS INC5 citations56