Inventor
NAKAYAMA YOUICHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “NAKAYAMA YOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7266418B2Sep 4, 2007
Substrate processing apparatus, history information recording method, history information recording program, and history information recording system
TOKYO ELECTRON LTD10 citations80
US7692916B2Apr 6, 2010
Capacitive coupling plasma processing apparatus and method
TOKYO ELECTRON LTD6 citations60
US9766617B2Sep 19, 2017
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations48