Inventor
CHANG CHI-KANG
TW16 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHI-KANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
11 patentsUS9946827B2Apr 17, 2018
Method and structure for mandrel and spacer patterning
TAIWAN SEMICONDUCTOR MFG CO LTD15 citations91
US11010526B2May 18, 2021
Method and structure for mandrel and spacer patterning
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12412016B2Sep 9, 2025
Method and structure for mandrel and spacer patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11748540B2Sep 5, 2023
Method and structure for mandrel and spacer patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12154975B2Nov 26, 2024
Method of manufacturing a semiconductor device and semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11094802B2Aug 17, 2021
Method of manufacturing a semiconductor device and semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10521541B2Dec 31, 2019
Method and structure for mandrel and spacer patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10515953B2Dec 24, 2019
Method and structure for gap filling improvement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9793268B2Oct 17, 2017
Method and structure for gap filling improvement
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US9543161B1Jan 10, 2017
Method of planarizating film
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10204867B1Feb 12, 2019
Semiconductor metrology target and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46