Inventor
CHEN MENG-WEI
TW20 patents
⚠️ This page may combine multiple inventors who share the name “CHEN MENG-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS11003091B2May 11, 2021
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10534272B2Jan 14, 2020
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10073354B2Sep 11, 2018
Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10146141B2Dec 4, 2018
Lithography process and system with enhanced overlay quality
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11940737B2Mar 26, 2024
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10461037B2Oct 29, 2019
Method for forming semiconductor device structure with overlay grating
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US10867933B2Dec 15, 2020
Method for forming semiconductor device structure with overlay grating
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10734325B2Aug 4, 2020
Method for forming semiconductor device structure with overlay grating
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9773671B1Sep 26, 2017
Material composition and process for mitigating assist feature pattern transfer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48