Inventor
KANEKO MOTOHIRO
JP4 patents
Patents
4 patentsUS5244501ASep 14, 1993
Apparatus for chemical vapor deposition
ULVAC CORP65 citations94
US4924807AMay 15, 1990
Apparatus for chemical vapor deposition
ULVAC CORP62 citations94
US4902531AFeb 20, 1990
Vacuum processing method and apparatus
ULVAC CORP45 citations94
US5125360AJun 30, 1992
Vacuum processing apparatus
ULVAC CORP27 citations91