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Inventor
HISATOME MASATOSHI
JP
2 patents
Patents
2 patents
US6353201B1
Mar 5, 2002
Discharge electrode, RF plasma generation apparatus using the same, and power supply method
MITSUBISHI HEAVY IND LTD
88 citations
95
US5265410A
Nov 30, 1993
Power generation system
MITSUBISHI HEAVY IND LTD
191 citations
93