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Inventor
DUSSAULT DAVID D
US
2 patents
Patents
2 patents
US6855207B2
Feb 15, 2005
Apparatus and system for eliminating contaminants on a substrate surface
IBM
0 citations
45
US6715497B2
Apr 6, 2004
Treatment to eliminate polysilicon defects induced by metallic contaminants
IBM
0 citations
45