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Inventor
SCHADT FRANK
US
2 patents
⚠️ This page may combine multiple inventors who share the name “SCHADT FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
1 patent
US10585356B2
Mar 10, 2020
Projection exposure apparatus and method for measuring a projection lens
ZEISS CARL SMT GMBH
0 citations
41
DU PONT
1 patent
US9312485B2
Apr 12, 2016
Process and materials for making contained layers and devices made with same
DU PONT
0 citations
38