Inventor
MATSUURA KATSUYOSHI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “MATSUURA KATSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
12 patentsUS5609721AMar 11, 1997
Semiconductor device manufacturing apparatus and its cleaning method
FUJITSU LTD112 citations95
US7176132B2Feb 13, 2007
Manufacturing method of semiconductor device
FUJITSU LTD30 citations92
US7078242B2Jul 18, 2006
Manufacturing method of semiconducter device
FUJITSU LTD24 citations92
US6740533B2May 25, 2004
Semiconductor device having a ferroelectric capacitor and fabrication process thereof
FUJITSU LTD30 citations92
US6624458B2Sep 23, 2003
Semiconductor device having a ferroelectric capacitor and fabrication process thereof
FUJITSU LTD40 citations92
US6674633B2Jan 6, 2004
Process for producing a strontium ruthenium oxide protective layer on a top electrode
FUJITSU LTD19 citations91
US6812510B2Nov 2, 2004
Ferroelectric capacitor, process for manufacturing thereof and ferroelectric memory
FUJITSU LTD11 citations73
US6617626B2Sep 9, 2003
Ferroelectric semiconductor memory device and a fabrication process thereof
FUJITSU LTD7 citations72
US6964873B2Nov 15, 2005
Semiconductor device having a ferroelectric capacitor and a fabrication process thereof
FUJITSU LTD7 citations70
US7459361B2Dec 2, 2008
Semiconductor device with ferroelectric capacitor and fabrication method thereof
FUJITSU LTD4 citations62
US7038264B2May 2, 2006
Semiconductor device and method for manufacturing the same
FUJITSU LTD0 citations51
US6777287B2Aug 17, 2004
Ferroelectric semiconductor memory device and a fabrication process thereof
FUJITSU LTD1 citations51
LINTEC CORP
4 patentsUS7434739B2Oct 14, 2008
Antenna circuit, IC inlet, IC tag, and IC card, as well as manufacturing method of IC tag and manufacturing method of IC card
LINTEC CORP28 citations92
US7397672B2Jul 8, 2008
Flip chip mounting substrate
LINTEC CORP2 citations62
US7498947B2Mar 3, 2009
Antenna circuit, IC inlet, multi tag, and method for producing multi tag
LINTEC CORP2 citations59
US7616171B2Nov 10, 2009
Connecting part of conductor pattern and conductor patterns-connected structure
LINTEC CORP0 citations45
FUJITSU MICROELECTRONICS LTD
4 patentsUS7550302B2Jun 23, 2009
Method of manufacturing semiconductor device
FUJITSU MICROELECTRONICS LTD2 citations63
US7501325B2Mar 10, 2009
Method for fabricating semiconductor device
FUJITSU MICROELECTRONICS LTD2 citations63
US7601585B2Oct 13, 2009
Method of manufacturing a ferroelectric semiconductor device utilizing an oxide reduction film
FUJITSU MICROELECTRONICS LTD0 citations52
US7622346B2Nov 24, 2009
Method for forming ferroelectric capacitor and method for fabricating semiconductor device
FUJITSU MICROELECTRONICS LTD0 citations40
FUJITSU SEMICONDUCTOR LTD
3 patentsUS7893472B2Feb 22, 2011
Ferroelectric memory device, ferroelectric memory manufacturing method, and semiconductor manufacturing method
FUJITSU SEMICONDUCTOR LTD3 citations63
US9935097B2Apr 3, 2018
Semiconductor integrated circuit apparatus and manufacturing method for same
FUJITSU SEMICONDUCTOR LTD0 citations52
US9093418B2Jul 28, 2015
Manufacture method for semiconductor device capable of preventing reduction of ferroelectric film
FUJITSU SEMICONDUCTOR LTD0 citations41